Development of Large Ultra-Precision Stage for Semiconductor Manufacturing

Japanese

Chinese

SPIDER is the name of linear motor (linear motion motor) which made from piezoelectric element that converts electrical power into mechanical power (left figure). Piezoelectric element has the ability of shearing and elastic deformation. Make use of these features, it will behave like living creature’s leg. Due to the eight legs like spider that it has, we named it SPIDER. Compared to the conventional motor, the advantages of SPIDER are it can work at an extremely high positioning accuracy of A (Angstrom: 1.0 × 10-10 meter), compact, high output and since it does not generate electromagnetic disturbances, it also can works in vacuum condition.

Applications

From the above features, SPIDER has attracted attention as technologies that can be applied in semiconductor manufacturing equipment (electron beam exposure) for which nanometer precision is demanded.
Other application domains that attract attention are fine processing equipments, nano-surgery equipments, manipulator application equipments and systems that drive the nanotechnology industries.