Development of a Large Ultra-Precision Stage for Semiconductor Manufacturing

SPIDER is a linear motor that uses piezoelectric elements to convert electrical energy into mechanical motion. Piezoelectric elements have two important characteristics: shear deformation and expansion/contraction deformation. By utilizing these characteristics, the mechanism behaves like the legs of a living creature. Because it consists of eight leg-like elements, it was named “SPIDER.”

Compared with conventional motors, SPIDER offers extremely high positioning accuracy on the order of angstroms, as well as compact size and high output. In addition, because it does not generate electromagnetic noise, it can operate in vacuum environments.

Applications

Owing to these features, SPIDER has attracted attention as a technology applicable to semiconductor manufacturing equipment, such as electron beam lithography systems, where nanometer-level precision is required. Other potential applications include fine processing equipment, probe systems, nano-surgery devices, and manipulator systems that support nanotechnology industries.